Handbook of moire measurement
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Contents:
Theory as well as some of the experimental results with the new method are delineated. Related Articles:.
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On Embedding of m-Sequential k-ary Trees into Hypercubes. Date: December 27, Date: June 27, Jeffrey M. McKenzie, Donald I. Siegel, Laura K. Lautz, Martin H. In addition, the Talbot effect is utilized to adjust the gap, or the so-called Talbot distance, between the grating and the wafer surface such that a fringe pattern of good quality can be obtained.
By using the phase shifting technique, the resolution or sensitivity can be enhanced by two order of magnitude. The results show that not only the full view of the whole wafer surface can be obtained, but enhanced surface resolution and accuracy can also be realized. The system can also be fully automated to become an on-line inspection tool. Sign In or Create an Account. Sign In. Advanced Search. Article Navigation. Close mobile search navigation Article navigation. Volume , Issue 2.
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Wei S. This Site. Google Scholar. Kao I. High concentration of lines clearly indicates stress concentration. Such fringes behavior indicates stress concentration evolution on the testing body due to the increasing loading. The fringe color intensity variation is associated to the imposed displacement variation, where the lowest displacement which is associated to the lowest stress is indicated predominantly by red color which progressively reaches the yellow color corresponding to the maximum imposed displacement of 7 mm which is, in turn, associated to the maximum stress.
By comparing fringe distances it can be noted that the diaphragm elements located at the upper right side exhibits higher stress concentration at the borders and as the displacement increases, elements located at the bottom left side will show similar behavior. That fact indicates that the deformation rate of the diaphragm element is different. Figure 11 shows stress evolution result on a diaphragm element generated by computer simulation for displacement variation from 1 mm to 7 mm.
Displacement and Strain Distribution Measurement by Sampling Moire Method
By analyzing Figure 11 it can be noted that the computer simulation indicates the higher stress concentration at the lateral region of the diaphragm spring, mainly at element basis as well as at diaphragm border. The central area of the diaphragm showed low stress concentration for the imposed displacement of 1 mm, mainly between the diaphragm border and the element basis, where the stress values were close to zero. The imposed displacement of 7 mm did not show qualitative differences on the stress distribution map when compared with the displacement of 1 mm, however the stress module was amplified.
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As the computer simulation map did not show qualitative differences on the stress distribution, remaining results were omitted, emphasizing that the stress modules are variables ranging from the maximum and minimum displacement. Some elements present certain irregularities associated to height and enclination.
Laboratory for Optomechanics and Micro/Nano Semiconductor/Photonics Systems
Quality control during production process aims to keep a pattern of maximum differentiation between element height and inclination. However, such a geometrical differentiation generates certain variations on the stress distribution during loading. That hypothesis was verified by means of the extensometric technique. Figure 13 shows the results yielded by means of the extensometric technique.
Results obtained as shown on the graph indicate that at each displacement applied on the testing body, an irregular deformation increment, i. This confirms that the stress and deformation variation between elements of a diaphragm spring is a recurrent situation and it must be considered in designs.
It was also revealed stress concentration at the element border as well as at the element basis. The element displacement increased with the stress module.
Summary. Since its development in the late s, the Moiré Fringe method has become a standard technique for the measurement of the behavior of materials. Handbook of Moire Measurement (Series in Optics and Optoelectronics) [C.A. Walker] on giuliettasprint.konfer.eu *FREE* shipping on qualifying offers. Since its.
Stress distribution showed no symmetry among the elements of the diaphragm membrane. The isochromatic fringes evolution related to pixel color intensity, position and distance, revelead the stress distribution dynamics on the diaphragm spring. Pixel intensity analysis show, in a qualitative way, the stress increase on the testing body.
Obtained results from computer simulation showed that stress module experienced an increment as the displacement was augmented. Stress concentration was located at element basis as well as at the diaphragm border. The hypothesis raised on the element geometric irregularities can be confirmed, since the loading test as imposed to the diaphragm spring are in close agreement.
The absence of variation on elements deformation results indicated by computational simulation has been occurred because this technique analyzes parts characterized to be isotropic, homogeneous, continuous and unique geometry between elements. The simplicity showed by the above referred method turn it attractive to the experimental mechanics study as well as to industrial applications.
Stress and deformation quantification studies are recommended for future studies. Varia Scientia Agrarias , v. Optical Methods.